离子注入机
中束流注入机
高能注入机
SiC注入机

低能大束流离子注入机 CI C60XP

产品简介

CI C60XP 低能大束流离子注入机具有较大的能量范围,在低能段表现出色,满足先进工艺需求。设备采用高WPH设计,实现工艺全覆盖。大束流注入机入选《中央企业科技创新成果推荐目录(2022年版)》,获评中国半导体创新产品和技术。

核心优势

  • 能量范围广低能段出色

  • 高WPH设计高产率

  • 工艺全覆盖

  • 多离子种类兼容

  • 优异的注入均匀性

FreeMarker template error (HTML_DEBUG mode; use RETHROW in production!)

标签 <@{0}> 缺少必填属性:{1}。

----
FTL stack trace ("~" means nesting-related):
	- Failed at: @cms_xmodel_data modelId=modelIdNum d...  [in template "zkx_pc/template/pr_productDetail.template.html" at line 340, column 22]
----

Java stack trace (for programmers):
----
com.chestnut.common.staticize.exception.MissionTagAttributeException: [... Exception message was already printed; see it above ...]
	at com.chestnut.common.staticize.tag.AbstractTag.validTagAttributes(AbstractTag.java:128)
	at com.chestnut.common.staticize.tag.AbstractTag.execute(AbstractTag.java:59)
	at freemarker.core.Environment.visit(Environment.java:461)
	at freemarker.core.UnifiedCall.accept(UnifiedCall.java:101)
	at freemarker.core.Environment.visit(Environment.java:344)
	at freemarker.core.Environment.visit(Environment.java:350)
	at freemarker.core.Environment.visit(Environment.java:350)
	at freemarker.core.Environment.process(Environment.java:323)
	at com.chestnut.common.staticize.StaticizeService.process(StaticizeService.java:101)
	at com.chestnut.contentcore.publish.staticize.ContentStaticizeType.doContentStaticize(ContentStaticizeType.java:128)
	at com.chestnut.contentcore.publish.staticize.ContentStaticizeType.contentStaticize(ContentStaticizeType.java:91)
	at com.chestnut.contentcore.publish.staticize.ContentStaticizeType.staticize(ContentStaticizeType.java:83)
	at com.chestnut.contentcore.publish.strategies.ThreadPoolPublishStrategy.lambda$publish$0(ThreadPoolPublishStrategy.java:59)
	at java.base/java.util.concurrent.ThreadPoolExecutor.runWorker(ThreadPoolExecutor.java:1136)
	at java.base/java.util.concurrent.ThreadPoolExecutor$Worker.run(ThreadPoolExecutor.java:635)
	at java.base/java.lang.Thread.run(Thread.java:840)