CI C60XP 低能大束流离子注入机具有较大的能量范围,在低能段表现出色,满足先进工艺需求。设备采用高WPH设计,实现工艺全覆盖。大束流注入机入选《中央企业科技创新成果推荐目录(2022年版)》,获评中国半导体创新产品和技术。
能量范围广低能段出色
高WPH设计高产率
工艺全覆盖
多离子种类兼容
优异的注入均匀性
标签 <@{0}> 缺少必填属性:{1}。
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FTL stack trace ("~" means nesting-related):
- Failed at: @cms_xmodel_data modelId=modelIdNum d... [in template "zkx_pc/template/pr_productDetail.template.html" at line 340, column 22]
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Java stack trace (for programmers):
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com.chestnut.common.staticize.exception.MissionTagAttributeException: [... Exception message was already printed; see it above ...]
at com.chestnut.common.staticize.tag.AbstractTag.validTagAttributes(AbstractTag.java:128)
at com.chestnut.common.staticize.tag.AbstractTag.execute(AbstractTag.java:59)
at freemarker.core.Environment.visit(Environment.java:461)
at freemarker.core.UnifiedCall.accept(UnifiedCall.java:101)
at freemarker.core.Environment.visit(Environment.java:344)
at freemarker.core.Environment.visit(Environment.java:350)
at freemarker.core.Environment.visit(Environment.java:350)
at freemarker.core.Environment.process(Environment.java:323)
at com.chestnut.common.staticize.StaticizeService.process(StaticizeService.java:101)
at com.chestnut.contentcore.publish.staticize.ContentStaticizeType.doContentStaticize(ContentStaticizeType.java:128)
at com.chestnut.contentcore.publish.staticize.ContentStaticizeType.contentStaticize(ContentStaticizeType.java:91)
at com.chestnut.contentcore.publish.staticize.ContentStaticizeType.staticize(ContentStaticizeType.java:83)
at com.chestnut.contentcore.publish.strategies.ThreadPoolPublishStrategy.lambda$publish$0(ThreadPoolPublishStrategy.java:59)
at java.base/java.util.concurrent.ThreadPoolExecutor.runWorker(ThreadPoolExecutor.java:1136)
at java.base/java.util.concurrent.ThreadPoolExecutor$Worker.run(ThreadPoolExecutor.java:635)
at java.base/java.lang.Thread.run(Thread.java:840)